1.According to the PLC program: low vacuum pumping vacuum valve closed all the mechanical pump to start, the normal operation after (about 1-2 min), open the valve to the low vacuum furnace is butterfly valve, low vacuum pre pumping of furnace body.

2.According to the PLC program: open under high vacuum butterfly valve for pumping diffusion pump, when the vacuum degree is below 15 Pa, automatically open the preheating diffusion pump system, usually after about 45 min diffusion pump start its function, can be closed butterfly valve, main valve to be open at the same time blocking vacuum can reach 1.33 * 10Pa, can open the heating button to heat the sample.

Vacuum furnace maintenance can guide the equipment operator in the responsibility scope of the inspection equipment parts, daily maintenance of equipment inspection methods and tools right according to the inspection cycle; the operator on the basis of the daily maintenance manual fill in the "maintenance record" heat treatment equipment daily maintenance, and by the team leader check, maintenance personnel archive collection. The complete set of equipment according to technical requirements, after installation, without missing parts, and good grounding, you can follow the following items for debugging and acceptance.